High-resolution x-ray micro-optics: technologies and materials

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The prospects for using high-resolution X-ray micro-lenses for coherent visualization tasks are discussed. Modern technologies and methods of micro-processing for the manufacture of 2D microlenses are considered using laser systems, ion-beam lithography and additive technologies as an example. The efficiency of various materials for X-ray micro-optics applications is evaluated and the time spent on manufacturing 100 nm resolution micro objectives using ion-beam lithography system is optimized.

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作者简介

I. Lyatun

Immanuel Kant Baltic Federal University

编辑信件的主要联系方式.
Email: ivanlyatun@gmail.com

International Research Center “Coherent X-ray Optics for Megascience Facilities”

俄罗斯联邦, Kaliningrad

P. Medvedskaya

Immanuel Kant Baltic Federal University

Email: ivanlyatun@gmail.com

International Research Center “Coherent X-ray Optics for Megascience Facilities”

俄罗斯联邦, Kaliningrad

А. Korotkov

Immanuel Kant Baltic Federal University

Email: ivanlyatun@gmail.com

International Research Center “Coherent X-ray Optics for Megascience Facilities”

俄罗斯联邦, Kaliningrad

S. Shevyrtalov

Immanuel Kant Baltic Federal University

Email: ivanlyatun@gmail.com

International Research Center “Coherent X-ray Optics for Megascience Facilities”

俄罗斯联邦, Kaliningrad

S. Lyatun

Immanuel Kant Baltic Federal University

Email: ivanlyatun@gmail.com

International Research Center “Coherent X-ray Optics for Megascience Facilities”

俄罗斯联邦, Kaliningrad

А. Snigirev

Immanuel Kant Baltic Federal University

Email: ivanlyatun@gmail.com

International Research Center “Coherent X-ray Optics for Megascience Facilities”

俄罗斯联邦, Kaliningrad

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2. Fig. 1. Schematic diagram of refractive and compound lenses.

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3. Fig. 2. Comparison of optical characteristics of X-ray optics materials (a), optical characteristics of a compound refractive lens depending on the radius of curvature of the parabolic profile (b).

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4. Fig. 3. Manufacturing of a diamond microlens by ion-beam lithography using gas chemistry (light areas – redeposited material), radius of curvature of the lens: a – 5.9; b – 3.3 µm.

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